- Authors:
- DOI:
- 10.3390/s100302348
- Abstract:
- A refractive index sensor has been fabricated in silicon oxynitride by standard UV lithography and dry etching processes. The refractive index sensor consists of a 1D photonic crystal (PhC) embedded in a microfluidic channel addressed by fiber-terminated planar waveguides. Experimental demonstrations performed with several ethanol solutions ranging from a purity of 96.00% (n = 1.36356) to 95.04% (n = 1.36377) yielded a sensitivity (Δλ/Δn) of 836 nm/RIU and a limit of detection (LOD) of 6 x 10-5 RIU, which is, however, still one order of magnitude higher than the theoretical lower limit of the limit of detection 1.3 x 10–6 RIU.
- Type:
- Journal article
- Language:
- English
- Published in:
- Sensors, 2010, Vol 10, Issue 3, p. 2348-2358
- Keywords:
- electrochromatography; 1D photonic crystal; integrated waveguides; refractive index sensor
- Main Research Area:
- Science/technology
- Publication Status:
- Published
- Review type:
- Peer Review
- Submission year:
- 2010
- Scientific Level:
- Scientific
- ID:
- 108154448