• EN
  • DA

Danish NationalResearch Database

  • Publications
  • Researchers
Example Finds records
water{} containing the word "water".
water supplies"{}" containing the phrase "water supplies".
author:"Doe, John"author:"{}" containing the phrase "Doe, John" in the author field.
title:IEEEtitle:{} containing the word "IEEE" in the title field.
bech{} containing the word "bech".
marie bech"{}" containing the phrase "marie bech".
orcid:0000-0002-5429-5292orcid:{} Having a particular ORCID
Need more help? Advanced search tutorial
  • Selected (0)
  • History

A simple electron-beam lithography system

    • Save to Mendeley
    • Export to BibTeX
    • Export to RIS
    • Email citation
Authors:
  • Mølhave, Kristian ;
    Close
    Orcid logo0000-0002-6493-2750
    Department of Micro- and Nanotechnology, Technical University of Denmark
  • Madsen, Dorte Nørgaard ;
    Close
    Department of Micro- and Nanotechnology, Technical University of Denmark
  • Bøggild, Peter
    Close
    Department of Micro- and Nanotechnology, Technical University of Denmark
DOI:
10.1016/j.ultramic.2004.09.011
Abstract:
A large number of applications of electron-beam lithography (EBL) systems in nanotechnology have been demonstrated in recent years. In this paper we present a simple and general-purpose EBL system constructed by insertion of an electrostatic deflector plate system at the electron-beam exit of the column of a scanning electron microscope (SEM). The system can easily be mounted on most standard SEM systems. The tested setup allows an area of up to about 50 x 50 pm to be scanned, if the upper limit for acceptable reduction of the SEM resolution is set to 10 run. We demonstrate how the EBL system can be used to write three-dimensional nanostructures by electron-beam deposition. (C) 2004 Elsevier B.V. All rights reserved.
Type:
Journal article
Language:
English
Published in:
Ultramicroscopy, 2005, Vol 102, Issue 3, p. 215-219
Keywords:
; e-Beam lithography; electron optics; SEM; electron-beam deposition; electron-beam-induced deposition
Main Research Area:
Science/technology
Submission year:
2005
ID:
9517651

Full text access

  • Doi Get publisher edition via DOI resolver
Checking for on-site access...

On-site access

At institution

  • Technical university of dk
Feedback

Sitemap

  • Search
    • Statistics
    • Tutorial
    • Data
    • FAQ
    • Contact
  • About
    • Institutions
    • Release History
    • Cookies and Personal Data
  • Open Access
    • The Danish Open Access Indicator

Copyright © 1998–2018.

Fivu en