1 Lab-on-a-Chip, Department of Micro- and Nanotechnology, Technical University of Denmark2 Department of Micro- and Nanotechnology, Technical University of Denmark3 Microreactors, Department of Micro- and Nanotechnology, Technical University of Denmark4 DTU Danchip, Technical University of Denmark5 Risø National Laboratory for Sustainable Energy, Technical University of Denmark6 Center for Nanostructured Graphene, Center, Technical University of Denmark
We demonstrate grey scale electron beam lithography on functionalized SU-8 resist for fabrication of single mode solid state dye laser devices. The resist is doped with Rhodamine 6G perchlorate and the lasers are based on a first order Bragg grating distributed feedback resonator. The lasers are optically pumped at 532 nm, and exhibit low lasing threshold from 530 nJ/mm2 and single mode output at selectable wavelengths from 580 to 630 nm, determined by the grating pitch. The lasers are well suited for integration into polymer based lab-on-chip circuits for interference based sensing.
Journal of Micromechanics and Microengineering, 2005, Vol 15, Issue 12, p. 2456-2460