We demonstrate grey scale electron beam lithography on functionalized SU-8 resist for fabrication of single mode solid state dye laser devices. The resist is doped with Rhodamine 6G perchlorate and the lasers are based on a first order Bragg grating distributed feedback resonator. The lasers are optically pumped at 532 nm, and exhibit low lasing threshold from 530 nJ/mm2 and single mode output at selectable wavelengths from 580 to 630 nm, determined by the grating pitch. The lasers are well suited for integration into polymer based lab-on-chip circuits for interference based sensing.
Journal of Micromechanics and Microengineering, 2005, Vol 15, Issue 12, p. 2456-2460