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Cantilever based mass sensor with hard contact readout

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Authors:
  • Dohn, Søren ;
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    Department of Micro- and Nanotechnology, Technical University of Denmark
  • Hansen, Ole ;
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    Orcid logo0000-0002-6090-8323
    Department of Micro- and Nanotechnology, Technical University of Denmark
  • Boisen, Anja
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    Orcid logo0000-0002-9918-6567
    Department of Micro- and Nanotechnology, Technical University of Denmark
DOI:
10.1063/1.2217161
Abstract:
We present a method for microcantilever resonant frequency detection. We measure the direct current from an intermittent contact once every vibration cycle between the conducting cantilever and a counterelectrode at a low bias voltage with respect to the cantilever, while the excitation frequency and amplitude are varied. The result is an almost "digital" detection of the resonant frequency. A relative frequency resolution Delta f/f of 1/80 000 with high signal to noise ratio in ambient conditions is demonstrated. The detection method can be applied to portable sensor systems with very high frequency nanoelectromechanical cantilevers using simple off-chip electronics.
Type:
Journal article
Language:
English
Published in:
Applied Physics Letters, 2006, Vol 88, Issue 26
Keywords:
NANOELECTROMECHANICAL SYSTEMS
Main Research Area:
Science/technology
Publication Status:
Published
Review type:
Peer Review
Submission year:
2006
Scientific Level:
Scientific
ID:
8204194

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