Cantilever based mass sensor with hard contact readout

Søren Dohn; Ole Hansen; Anja Boisen

doi:10.1063/1.2217161

Cantilever based mass sensor with hard contact readout

Authors:

Dohn, Søren ;
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Department of Micro- and Nanotechnology, Technical University of Denmark
Hansen, Ole ;
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0000-0002-6090-8323
Department of Micro- and Nanotechnology, Technical University of Denmark
Boisen, Anja
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0000-0002-9918-6567
Department of Micro- and Nanotechnology, Technical University of Denmark

DOI:

10.1063/1.2217161

Abstract:

We present a method for microcantilever resonant frequency detection. We measure the direct current from an intermittent contact once every vibration cycle between the conducting cantilever and a counterelectrode at a low bias voltage with respect to the cantilever, while the excitation frequency and amplitude are varied. The result is an almost "digital" detection of the resonant frequency. A relative frequency resolution Delta f/f of 1/80 000 with high signal to noise ratio in ambient conditions is demonstrated. The detection method can be applied to portable sensor systems with very high frequency nanoelectromechanical cantilevers using simple off-chip electronics.

Type:

Journal article

Language:

English

Published in:

Applied Physics Letters, 2006, Vol 88, Issue 26

Keywords:

NANOELECTROMECHANICAL SYSTEMS

Main Research Area:

Science/technology

Publication Status:

Published

Review type:

Peer Review

Submission year:

2006

Scientific Level:

Scientific

ID:

8204194

Cantilever based mass sensor with hard contact readout

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