- Authors:
- DOI:
- 10.1063/1.2362593
- Abstract:
- Transducers based on quantum mechanical tunneling provide an extremely sensitive sensor principle, especially for nanoelectromechanical systems. For proper operation a gap between the electrodes of below 1 nm is essential, requiring the use of structures with a mobile electrode. At such small distances, attractive van der Waals and capillary forces become sizable, possibly resulting in snap-in of the electrodes. The authors present a comprehensive analysis and evaluation of the interplay between the involved forces and identify requirements for the design of tunneling sensors. Based on this analysis, a tunneling sensor is fabricated by Si micromachining technology and its proper operation is demonstrated. (c) 2006 American Institute of Physics.
- Type:
- Journal article
- Language:
- English
- Published in:
- Applied Physics Letters, 2006, Vol 89, Issue 17
- Keywords:
- ATOMIC-FORCE MICROSCOPY; FABRICATION; MASS DETECTION
- Main Research Area:
- Science/technology
- Publication Status:
- Published
- Review type:
- Peer Review
- Submission year:
- 2006
- Scientific Level:
- Scientific
- ID:
- 7918752
0000-0002-9918-6567
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