1 Department of Micro- and Nanotechnology, Technical University of Denmark2 Self-Organized Nanoporous Materials, Department of Micro- and Nanotechnology, Technical University of Denmark3 Experimental Surface and Nanomaterials Physics, Department of Physics, Technical University of Denmark4 Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark5 Center for Nanostructured Graphene, Center, Technical University of Denmark
Abstract Fabrication of meso-porous metal oxide thin films with high surface area is a crucial requirement for numerous applications, such as catalysis, photovoltaics and electronics. Despite considerable progress in fabrication of three-dimensional metal oxide nanostructures, it is still quite challenging to manufacture highly ordered structures over a large area in a controlled way. The main objective of this study is to demonstrate fabrication of interconnected, crack-free and highly ordered ceramic films using a nano-porous polymer with gyroid morphology as template. Titanium tetraisopropoxide and tin chloride dihydrate are used as precursors for nanostructured TiO2 and SnO2, respectively. Complete precursor infiltration into the template and successful transformation into metal oxides can be achieved by rational tuning of the template chemistry. As a result, thin films of nanostructured metal oxides with gyroid morphology, such as titania and tin dioxide, are created and thoroughly characterized by scanning electron microscopy, transmission electron microscopy, energy-dispersive analysis, x-ray diffraction and Brunauer-Emmett-Teller analysis.
Microporous and Mesoporous Materials, 2015, Vol 210, p. 161-168
Block copolymer; Melt infiltration; Nanoporous metal oxide; Templating