The paper discusses a novel application of a thin layer coating on a metallic machined surface with particular attention to roughness of the coating compared to the original surface before coating. The coating is a nominally 1 μm film of Hydrogen Silsesquioxane (HSQ) which is commonly used in the semiconductor industry in the manufacture of integrated circuits. The work piece is a fine peripheral-milled tool steel surface which is widely used in industrial applications. Roughness improvement after the application of HSQ coating is reported.
Proceedings of the 14th Euspen International Conference, 2014