1 Department of Micro- and Nanotechnology, Technical University of Denmark2 Optofluidics, Department of Micro- and Nanotechnology, Technical University of Denmark3 Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark4 Department of Photonics Engineering, Technical University of Denmark5 University of Southern Denmark6 Center for Nanostructured Graphene, Center, Technical University of Denmark
We demonstrate the highly efficient (>50%) conversion of freely propagating light to channel plasmon-polaritons (CPPs) in gold V-groove waveguides using compact 1.6 μm long waveguide-termination coupling mirrors. Our straightforward fabrication process, involving UV-lithography and crystallographic silicon etching, forms the coupling mirrors innately and ensures exceptional-quality, wafer-scale device production. We tailor the V-shaped profiles by thermal silicon oxidation in order to shift initially wedge-located modes downward into the V-grooves, resulting in well-confined CPPs suitable for nanophotonic applications.
International Nano Letters, 2014, Vol 14, Issue 3, p. 1659-1664