1 Department of Micro- and Nanotechnology, Technical University of Denmark2 Self-Organized Nanoporous Materials, Department of Micro- and Nanotechnology, Technical University of Denmark3 Center for Electron Nanoscopy, Technical University of Denmark4 Center for Nanostructured Graphene, Center, Technical University of Denmark5 University College Cork
This paper describes the fabrication of nanodimensioned silicon structures on silicon wafers from thin films of a poly(styrene)-block-poly(dimethylsiloxane) (PS-b-PDMS) block copolymer (BCP) precursor self-assembling into cylindrical morphology in the bulk. The structure alignment of the PS-b-PDMS (33 k–17 k) was conditioned by applying solvent and solvothermal annealing techniques. BCP nanopatterns formed after the annealing process have been confirmed by scanning electron microscope (SEM) after removal of upper PDMS wetting layer by plasma etching. Silicon nanostructures were obtained by subsequent plasma etching to the underlying substrate by an anisotropic dry etching process. SEM images reveal the formation of silicon nanostructures, notably of sub-15nm dimensions.