1 Department of Mechanical Engineering, Technical University of Denmark2 Solid Mechanics, Department of Mechanical Engineering, Technical University of Denmark3 Katholieke Universiteit
The aim of this paper is to incorporate a model for micro/nano lithography production processes in topology optimization. The production process turns out to provide a physical analogy for projection filters in topology optimization. Blueprints supplied by the designers cannot be directly used as inputs to lithographic processes due to the proximity effect which causes rounding of sharp corners and geometric interaction of closely spaced design elements. Therefore, topology optimization is applied as a tool for proximity effect correction. Furthermore, it is demonstrated that the robust projection filter can be used to account for uncertainties due to lithographic production processes which results in manufacturable blueprint designs and eliminates the need for subsequent corrections.
Structural and Multidisciplinary Optimization, 2013, Vol 48, Issue 4, p. 717-730