Keller, Stephan Sylvest3; Bosco, Filippo1; Boisen, Anja3
1 Department of Micro- and Nanotechnology, Technical University of Denmark2 Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark3 Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, Center, Technical University of Denmark
We present the fabrication of a wafer-scale shadow mask with arrays of circular holes with diameters of 150–400 μm. Standard UV photolithography is used to define 700 μm thick SU-8 structures followed by electroplating of nickel and etching of the template. The ferromagnetic properties of the shadow mask allow magnetic clamping to the substrate and spray coating of well defined polymer patterns.
Microelectronic Engineering, 2013, Vol 110, p. 427-431
Spray coating; Nickel electroplating; Magnetic clamping; Eudragit; Polymer patterning