Schmid, Silvan3; Bagci, Tolga4; Zeuthen, Emil4; Taylor, Jacob M.9; Herring, Patrick K.10; Cassidy, Maja C.10; Marcus, Charles M.4; Villanueva Torrijo, Luis Guillermo1; Amato, Bartolo7; Boisen, Anja3; Shin, Yong Cheol11; Kong, Jing11; Sørensen, Anders S.4; Usami, Koji4; Polzik, Eugene S.4
1 Department of Micro- and Nanotechnology, Technical University of Denmark2 Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark3 Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, Center, Technical University of Denmark4 University of Copenhagen5 National Institute of Standards and Technology6 Harvard University7 Technical University of Denmark8 Massachusetts Institute of Technology9 National Institute of Standards and Technology10 Harvard University11 Massachusetts Institute of Technology
Due to their exceptional mechanical and optical properties, dielectric silicon nitride (SiN) micromembranes have become the centerpiece of many optomechanical experiments. Efficient capacitive coupling of the membrane to an electrical system would facilitate exciting hybrid optoelectromechanical devices. However, capacitive coupling of such SiN membranes is rather weak. Here we add a single layer of graphene on SiN micromembranes (SiN-G) and compare the electromechanical coupling and mechanical properties to bare SiN membranes and to membranes coated with an aluminium layer (SiN-Al). The electrostatic force to external coplanar electrodes of SiN-G membranes is found to be equal to that of the SiN-Al membranes and corresponds to the theoretical value calculated for a perfectly conductive membrane coating. Our results show that a single layer of graphene substantially enhances the electromechanical capacitive coupling of a SiN membrane without significantly adding mass, decreasing the mechanical quality factor or affecting the optical properties.