Schmid, Silvan3; Bagci, Tolga4; Zeuthen, Emil4; Taylor, Jacob M.9; Herring, Patrick K.10; Cassidy, Maja C.10; Marcus, Charles M.4; Villanueva Torrijo, Luis Guillermo1; Armato, Bartolo7; Boisen, Anja3; Shin, Yong Cheol11; Kong, Jing11; Sørensen, Anders S.4; Usami, Koji4; Polzik, Eugene S.4
1 Department of Micro- and Nanotechnology, Technical University of Denmark2 Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark3 Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, Center, Technical University of Denmark4 University of Copenhagen5 National Institute of Standards and Technology6 Harvard University7 Technical University of Denmark8 Massachusetts Institute of Technology9 National Institute of Standards and Technology10 Harvard University11 Massachusetts Institute of Technology
Due to their low mass, high quality factor, and good optical properties, silicon nitride (SiN) micromembrane resonators are widely used in force and mass sensing applications, particularly in optomechanics. The metallization of such membranes would enable an electronic integration with the prospect for exciting new devices, such as optoelectromechanical transducers. Here, we add a single-layer graphene on SiN micromembranes and compare electromechanical coupling and mechanical properties to bare dielectric membranes and to membranes metallized with an aluminium layer. The electrostatic coupling of graphene covered membranes is found to be equal to a perfectly conductive membrane, without significantly adding mass, decreasing the superior mechanical quality factor or affecting the optical properties of pure SiN micromembranes. The concept of graphene-SiN resonators allows a broad range of new experiments both in applied physics and fundamental basic research, e.g., for the mechanical, electrical, or optical characterization of graphene.
Journal of Applied Physics, 2014, Vol 115, Issue 5