Turbostratic-like carbon nitride coatings deposited by industrial-scale direct current magnetron sputtering

Authors:

Louring, Sascha ;
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iNano-School, Science and Technology, Aarhus University
Madsen, Nis Dam ;
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Interdisciplinary Nanoscience Center - INANO-Fysik, Ny Munkegade, Interdisciplinary Nanoscience Center, Science and Technology, Aarhus University
Berthelsen, Anders Nørløv ;
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iNano-School, Science and Technology, Aarhus University
Christensen, B. H. ;
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DTI
Almtoft, K.P. ;
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DTI
Nielsen, Lars Pleth ;
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Teknologisk Institut
Bøttiger, Jørgen
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Department of Physics and Astronomy, Science and Technology, Aarhus University

DOI:

10.1016/j.tsf.2013.03.016

Type:

Journal article

Language:

English

Published in:

Thin Solid Films, 2013, Vol 536, p. 25-31

Main Research Area:

Science/technology

Publication Status:

Published

Review type:

Peer Review

Submission year:

2013

Scientific Level:

Scientific

ID:

241337799

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