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Turbostratic-like carbon nitride coatings deposited by industrial-scale direct current magnetron sputtering

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Authors:
  • Louring, Sascha ;
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    iNano-School, Science and Technology, Aarhus University
  • Madsen, Nis Dam ;
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    Interdisciplinary Nanoscience Center - INANO-Fysik, Ny Munkegade, Interdisciplinary Nanoscience Center, Science and Technology, Aarhus University
  • Berthelsen, Anders Nørløv ;
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    iNano-School, Science and Technology, Aarhus University
  • Christensen, B. H. ;
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    DTI
  • Almtoft, K.P. ;
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    DTI
  • Nielsen, Lars Pleth ;
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    Teknologisk Institut
  • Bøttiger, Jørgen
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    Department of Physics and Astronomy, Science and Technology, Aarhus University
DOI:
10.1016/j.tsf.2013.03.016
Type:
Journal article
Language:
English
Published in:
Thin Solid Films, 2013, Vol 536, p. 25-31
Main Research Area:
Science/technology
Publication Status:
Published
Review type:
Peer Review
Submission year:
2013
Scientific Level:
Scientific
ID:
241337799

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