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1 Department of Micro- and Nanotechnology, Technical University of Denmark 2 Polymer Micro & Nano Engineering, Department of Micro- and Nanotechnology, Technical University of Denmark 3 MEMS-AppliedSensors, Department of Micro- and Nanotechnology, Technical University of Denmark 4 Danish Technological Institute 5 Technical University of Denmark 6 Danish Technological Institute
We present an anode design for silicon-based direct methanol fuel cell (DMFC) applications. Platinum was deposited conformally by atomic layer deposition (ALD) onto vertically aligned, nitrogendoped multi-walled carbon nanotubes (MWCNTs) grown on porous silicon. The deposition was carried out in a top-flow ALD reactor at 250°C, using MeCpPtMe3 and O2 as precursors. The anode was tested for the methanol oxidation reaction (MOR) in a three-electrode electrochemical set-up and it showed improved catalytic activity compared to a reference sample of Pt deposited on flat Si. It is demonstrated that ALD could be a MEMS compatible deposition technique for Si-based fuel cell applications. © The Electrochemical Society.
Ecs Transactions, 2012, p. 117-125
Catalyst activity; Deposition; Direct methanol fuel cells (DMFC); Platinum; Porous silicon; Silicon; Atomic layer deposition
Main Research Area:
E C S Transactions
Pacific Rim Meeting on Electrochemical and Solid-State Science, 2012