1 Department of Electrical Engineering, Technical University of Denmark2 Electromagnetic Systems, Department of Electrical Engineering, Technical University of Denmark3 Lancaster University4 University of Roma ‘Tor Vergata’5 Unité Mixte de Physique CNRS/Thales6 Thales Electron Device7 Goethe University of Frankfurt am Main8 Center for Hyperpolarization in Magnetic Resonance, Center, Technical University of Denmark9 Lancaster University
The design and fabrication challenges in the first ever attempt to realize a 1-THz vacuum tube amplifier are described. Implementation of innovative solutions including a slow-wave structure in the form of a double corrugated waveguide, lateral tapered input and output couplers, deep X-ray LIGA fabrication process, and a cascade architecture of the backward wave amplifier are discussed. New knowledge in the field of terahertz vacuum devices brought by intensive simulations and development of advanced fabrication and assembly processes of the micro-structures is highlighted.
I E E E Transactions on Electron Devices, 2013, Vol 60, Issue 3, p. 1236-1243