Yates, B. R.10; Darby, B. L.10; Petersen, Dirch Hjorth1; Hansen, Ole3; Lin, Rong6; Nielsen, P. F.6; Romano, L.7; Doyle, B. L.8; Kontos, A.9; Jones, K. S.10
1 Department of Micro- and Nanotechnology, Technical University of Denmark2 Nanointegration, Department of Micro- and Nanotechnology, Technical University of Denmark3 Experimental Surface and Nanomaterials Physics, Department of Physics, Technical University of Denmark4 Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark5 University of Florida6 Capres A/S7 Università di Catania8 Sandia National Laboratories9 Applied Materials10 University of Florida
The activation and thermal stability of ultra-shallow B+ implants in crystalline (c-Ge) and preamorphized Ge (PA-Ge) following rapid thermal annealing was investigated using micro Hall effect and ion beam analysis techniques. The residual implanted dose of ultra-shallow B+ implants in Ge was characterized using elastic recoil detection and was determined to correlate well with simulations with a dose loss of 23.2%, 21.4%, and 17.6% due to ion backscattering for 2, 4, and 6 keV implants in Ge, respectively. The electrical activation of ultra-shallow B+ implants at 2, 4, and 6 keV to fluences ranging from 5.0 × 1013 to 5.0 × 1015 cm-2 was studied using micro Hall effect measurements after annealing at 400-600 °C for 60 s. For both c-Ge and PA-Ge, a large fraction of the implanted dose is rendered inactive due to the formation of a presumable B-Ge cluster. The B lattice location in samples annealed at 400 °C for 60 s was characterized by channeling analysis with a 650 keV H+ beam by utilizing the 11B(p, α)2α nuclear reaction and confirmed the large fraction of off-lattice B for both c-Ge and PA-Ge. Within the investigated annealing range, no significant change in activation was observed. An increase in the fraction of activated dopant was observed with increasing energy which suggests that the surface proximity and the local point defect environment has a strong impact on B activation in Ge. The results suggest the presence of an inactive B-Ge cluster for ultra-shallow implants in both c-Ge and PA-Ge that remains stable upon annealing for temperatures up to 600 °C.
Journal of Applied Physics, 2012, Vol 112, Issue 12
boron; elemental semiconductors; germanium; ion implantationi; point defects; rapid thermal annealing; thermal stability