1 Department of Micro- and Nanotechnology, Technical University of Denmark2 Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark3 Molecular Windows, Department of Micro- and Nanotechnology, Technical University of Denmark4 Nanointegration, Department of Micro- and Nanotechnology, Technical University of Denmark5 Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, Center, Technical University of Denmark6 Imperial College London7 Center for Nanostructured Graphene, Center, Technical University of Denmark8 Imperial College London
We present here a proof of concept for a novel fabrication method of vertically aligned carbon nanotube forests, utilizing black silicon nanograss (a forest of silicon nanometer-sized spikes created with reactive ion etching) coated with titanium tungsten diffusion barrier as a template. The method allows maskless definition of carbon nanotube forests with control of their density, nanotube diameter and height. Four nanograss reactive ion etching recipes are investigated and their wafer-to-wafer repeatability, wafer uniformity, and density control is discussed. Evaluation of carbon nanotube forests grown on the nanograss substrates is presented with discussion of their morphology, diameter distribution, and catalyst thickness influence.
Microelectronic Engineering, 2013, Vol 104, p. 110-113
Carbon nanotubes; Black silicon; Nanograss; Maskless; Catalyst; Titanium tungsten