1 Department of Micro- and Nanotechnology, Technical University of Denmark2 MEMS-AppliedSensors, Department of Micro- and Nanotechnology, Technical University of Denmark3 Experimental Surface and Nanomaterials Physics, Department of Physics, Technical University of Denmark4 Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark5 Meggitt A/S6 unknown
In this work a batch of MEMS-based vibration energy harvesters consisting of a silicon/PZT thick film ntilever with integrated proof mass is characterized. The purpose of a vibration energy harvester is to convert low grade vibrations to useful electrical power. Optimally, the natural frequency of the harvester should match the frequency of he ambient vibration. The first step to achieve this is to evaluate the uniformity of the fabricated harvesters and nderstand the effects of temperature on the harvesters during operation. Therefore, the uniformity of 40 energy harvesters from one wafer has been evaluated. Thereafter the performance of the energy harvesters operating at emperatures between -30°C to 100°C was measured.
Procedia Engineering, 2012, Vol 47, p. 1434-1437
Energy harvester; MEMS; Piezoelectric; Temperature range; Performance