Christiansen, Alexander Bruun1; Clausen, Jeppe3; Mortensen, N. Asger5; Kristensen, Anders5
1 Department of Micro- and Nanotechnology, Technical University of Denmark2 Optofluidics, Department of Micro- and Nanotechnology, Technical University of Denmark3 Department of Photonics Engineering, Technical University of Denmark4 Structured Electromagnetic Materials, Department of Photonics Engineering, Technical University of Denmark5 Center for Nanostructured Graphene, Center, Technical University of Denmark
The scattering properties of randomly structured antireflective black silicon polymer replica have been investigated. Using a two-step casting process, the structures can be replicated in Ormocomp on areas of up to 3 in. in diameter. Fourier analysis of scanning electron microscopy images of the structures shows that the scattering properties of the surfaces are related to the spatial periods of the nanostructures. Structures with a dominating spatial period of 160 nm, a height of 200 nm, and aspect ratio of 1.3 show insignificant scattering of light with wavelength above 500 nm and lower the reflectance by a factor of two.