Xu, R.2; Lei, A.2; Christiansen, T. L.2; Hansen, K.4; Guizzetti, M.4; Birkelund, Karen5; Thomsen, E. V.2; Hansen, Ole6
1 Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark2 Department of Micro- and Nanotechnology, Technical University of Denmark3 MEMS-AppliedSensors, Department of Micro- and Nanotechnology, Technical University of Denmark4 Meggitt Sensing Systems5 DTU Danchip, Technical University of Denmark6 Experimental Surface and Nanomaterials Physics, Department of Physics, Technical University of Denmark
We present a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The most common piezoelectric energy harvesting devices utilize a cantilever beam of a non piezoelectric material as support beneath or in-between the piezoelectric material. It provides mechanical support but it also reduces the power output. Our device replaces the support with another layer of the piezoelectric material, and with the absence of an inactive mechanical support all of the stresses induced by the vibrations will be harvested by the active piezoelectric elements.
Transducers 2011, 2011, p. 679-682
Energy harvester; MEMS; Thick film; PZT; Bimorph; Vibrations; Micromechanical devices; Resonant frequency; Electrodes; Energy harvesting; Thick films; Fabrication
Main Research Area:
16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)