The NOx reduction of flue gas by plasma generated ozone was investigated in pilot test experiments at two industrial power plants running on natural gas (Ringsted) and biomass (Haslev). Reduction rates higher than 95% have been achieved for a molar ratio O3:NOx of 1.56. Fourier transform infrared and ultraviolet absorption spectroscopy were used for spatial measurements of stable molecules and radicals along the reduction reactor. Reactions of O3 injected in the flue gas in the reduction reactor were also modeled including the influence of the flue gas temperature, water droplets and SOx and HCl content. Experiments are in good agreement with numerical simulations. An optimized oxidation scheme for NOx reduction processes with time dependent combustion, such as the biomass power plants, was developed. Ozone production by micro-hollow and capillary discharges at atmospheric pressures was investigated for oxygen and air gas flows.