1 Glass Components and Materials, Department of Photonics Engineering, Technical University of Denmark2 Department of Photonics Engineering, Technical University of Denmark
Burned photoresist is used as etch mask when producing silica-onsilicon waveguides. The sidewall angle of the optical glass waveguides is engineered by varying photoresist thickness and etch selectivity. The principle for the formation of the angles is introduced and very promising experimental results are shown.
Electronics Letters, 2004, Vol 40, Issue 1, p. 27-29