Yalcinkaya, Arda Deniz2; Ravnkilde, Jan Tue1; Hansen, Ole3
1 Department of Micro- and Nanotechnology, Technical University of Denmark2 Department of Electrical Engineering, Technical University of Denmark3 Experimental Surface and Nanomaterials Physics, Department of Physics, Technical University of Denmark
A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators are characterised with respect to the quality factor.
Electronics Letters, 2002, Vol 38, Issue 24, p. 1526-1527