1 Bioprobes, Department of Micro- and Nanotechnology, Technical University of Denmark2 Department of Micro- and Nanotechnology, Technical University of Denmark3 Microreactors, Department of Micro- and Nanotechnology, Technical University of Denmark4 Center for Individual Nanoparticle Functionality, Center, Technical University of Denmark5 Experimental Surface and Nanomaterials Physics, Department of Physics, Technical University of Denmark6 Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, Center, Technical University of Denmark
Stress in polymeric resins is tailored by a thermomechanical process. It allows for controlled self-positioning of membranes in microdevices (see Figure). The process makes specific use of plastic deformation that results from the low viscosity of the polymer. This demonstrates that polymers offer new approaches to microfabrication that cannot be realized for common semiconductor materials without severe difficulties.
Advanced Materials, 2006, Vol 18, Issue 2, p. 238-241