1 Department of Control and Engineering Design, Technical University of Denmark2 Department of Micro- and Nanotechnology, Technical University of Denmark3 Experimental Surface and Nanomaterials Physics, Department of Physics, Technical University of Denmark
A controllable microswitch comprises a closed cavity having a plurality of contact electrodes, a movable switch body capable of making and breaking an electrical connection between the contact electrodes, and a plurality of control electrodes capable of generating an electrical field to control the position of the switch body. The switch body is formed by a diaphragm which is provided with a conducting surface and which divides the cavity into two subcavities. A method of making such a microswitch is moreover disclosed. The microswitch may be used for power regulation of systems connected to an electrical voltage source and for remote-controlled connection and disconnection of an electrical apparatus.