1 Department of Micro- and Nanotechnology, Technical University of Denmark2 Experimental Surface and Nanomaterials Physics, Department of Physics, Technical University of Denmark
The micromechanically produced microphone consists of a housing (1) wherein a transducer element (2) is placed and which has a sound inlet (3) on one side of the transducer element and a pressure compensation hole (4) on the other side. In order to protect the microphone against humidity, dust and dirt, which partly or totally will be able to destroy its characteristics, a sealing acoustic membrane (6, 7) is placed on each side of the transducer element. The transducer element can for example be a capacitive transducer with external bias or an electret based transducer. The microphone, which can be produced in very small dimension, is among other things suitable for use in hearing aids.