Microcantilevers can be fabricated in TOPAS by nanoimprint lithography, with the dimensions of 500 Â¿m length 4.5 Â¿m thickness and 100 Â¿m width. By using a plasma polymerization technique it is possible to selectively functionalize individually cantilevers with a polymer coating, on wafer scale by using a shadow masking technique.
2010 Ieee 23rd International Conference on Micro Electro Mechanical Systems (mems), 2010, p. 612-614
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2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010