Measurement of the Resonant Frequency of Nano-Scale Cantilevers by Hard Contact Readout

Søren Dohn; Ole Hansen; A. Bolsen

doi:10.1016/j.mee.2007.12.039

Measurement of the Resonant Frequency of Nano-Scale Cantilevers by Hard Contact Readout

Authors:

Dohn, Søren ;
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Department of Micro- and Nanotechnology, Technical University of Denmark
Hansen, Ole ;
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0000-0002-6090-8323
Department of Micro- and Nanotechnology, Technical University of Denmark
Bolsen, A.
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unknown

DOI:

10.1016/j.mee.2007.12.039

Abstract:

It is shown that detection of the resonant frequency of a nano-scale cantilever is possible by measuring the time average current flowing from an electrode to the cantilever during hard contact occurring twice every cycle of the cantilever vibration. The electronic detection method is insensitive to unavoidable stray capacitances in the system and provides very high resolution using simple low bandwidth off-chip electronics. Moreover, the detection method does not suffer from the common problem in electronic detection methods, where the strong actuation signals often contaminate the detected signal. The readout method is thereby ideally suited for portable sensor systems.

Type:

Journal article

Language:

English

Published in:

Microelectronic Engineering, 2008, Vol 85, Issue 5-6, p. 1390-1394

Keywords:

Main Research Area:

Science/technology

Publication Status:

Published

Review type:

Peer Review

Submission year:

2008

Scientific Level:

Scientific

ID:

2168817102

Measurement of the Resonant Frequency of Nano-Scale Cantilevers by Hard Contact Readout

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