1 Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2 NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark3 Department of Micro- and Nanotechnology, Technical University of Denmark4 unknown5 Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, Center, Technical University of Denmark
A heater design, used in a micro-calorimetric sensor, has been optimized for temperature uniformity in order to increase the sensitivity and reliability of detection of trace amounts of explosives. In this abstract the design, fabrication and characterization is described. The performance of the novel heater design is characterized by measuring the temperature coefficient of resistivity (TCR) values and by mapping the temperature distribution using Raman spectroscopy. The new heater design is seen to have increased the temperature uniformity by a factor of 2.3.
Microelectronic Engineering, 2010, Vol 87, Issue 5-8, p. 696-698